The following is a list of standard recipes, techniques, tips and other various application notes that have been developed in the nanoFAB over time. The information here may serve as a useful starting point for further process development.
| Title | Applicable Equipment | Process Area |
|---|---|---|
| Aluminum Etching | Wet Deck | Wet-Etch |
| AZ 1512 & 1529 photoresist baseline recipes | Spinner, hotplate, mask aligner, maskless aligner | Photolithography |
| AZ 5214E photoresist baseline recipe | Spinner, hotplate, mask aligner, maskless aligner | Photolithography |
| AZ P4620 photoresist baseline recipe | Spinner, hotplate, mask aligner, maskless aligner | Photolithography |
| CasaXPS Library Files for Kratos Ultra and PHI VPIII | Kratos Ultra XPS and PHI VPIII | |
| Chrome Etching | Wet Deck | Wet-Etch |
| Gold Etching | Wet Deck | wet-etch |
| HF etching | Wet Process - HF/BOE - Wet Deck 1A / 1B | wet etch |
| KOH Etching of Bulk Silicon | KOH Etch Bath | Etch |
| LOR 5B / AZ 1512 Bilayer Procedure | HMDS oven, spinner, hotplate, mask aligner, direct-write lithography system, litho wet deck | Lithography |
| LOR 5B / HPR 504 Bilayer Recipe | HMDS Oven, Spinner, hotplate | Lithography |
| Nitric Acid Etching and Disposal | Wet Deck | Wet-Etch |
| Parylene adhesion promotion | Parylene deposition system (PDS 2010 Labcoater) | Deposition |
| PDMS Micromolding | ICPRIE, PDMS Station | PDMS |
| PDMS Residue Removal Process using TBAF | PDMS | |
| Piranha Cleaning | Wet Deck | wet-etch, cleaning |
| PMMA EBL Lift Off Procedure | RAITH150 Two | EBL, Lithography |
| PVD film thickness measurements using standard witness chips | PVD tools (sputtering, e-beam evaporation), general use wet deck, Alpha-Step IQ | Deposition, characterization |
| Spin-on polyimide SOP (non-photodefinable) | Aisle 1 fumehood, Headway spinner, vacuum oven | spin-coating |
| SU-8 Negative Photoresist | Head-way spinner, hotplate, mask aligner | lithography |
| SUSS MABA6 Chuck Diagrams | SUSS MABA6 | Lithography |
| Temporary wafer bonding using Crystalbond | spinner, hotplate, plasma etch systems | bonding, etch |
| ZEP Exposure & Development Results | RAITH 150-II, Cold Plate | EBL, Lithography |
| ZEP Spin Curves | Headway Resist Spinner | lithography |