ProductOrganic Polymer Solution / 950 PMMA Series Resists in Anisole
ManufacturerMicroChem Corporation
Composition1–15% poly(methylmethacrylate), 85–99% anisole; liquid
SynonymsPMMA, PMMA 950
Typical Uses

Electron-beam lithography resist

Hazards

1 0 2

Flammable Toxic

Serious eye damage/eye irritation Category 2B ,  Flammable liquids Category 3 ,  Skin corrosion/irritation Category 3 , Acute toxicity (inhalation – gas/vapour)  Category 3 ,  Specific target organ toxicity – single exposure Category 3 , Aquatic hazards / aquatic environmental toxicity Category 3

StorageCabinet 6 (flammables cabinet in Wet Aisle 2); Cabinet 11 (flammables cabinet in Wet Aisle 1)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
Status

STOCKED  

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Please contact a nanoFAB staff member for uses not listed above.