ProductAntimony trisulfide precursor solution
ManufacturerComponents manufactured by Fisher Scientific; mixed in user's lab.
Composition35.9 wt.% carbon disulfide, 30.3 wt.% ethanol, 28.1 wt.% n-butylamine, 5.7% antimony trioxide; liquid
Typical UsesSpin-on material for Sb2S3 direct patterning

3 0 4 Flammable Corrosive Toxic Serious health effects Less serious health effects

Serious eye damage/eye irritation Category 1 ;  Specific target organ toxicity – repeated exposure Category 1 (liver, kidney, cardiovascular system); Skin corrosion/irritation Category 1A ;  Reproductive toxicity Category 2 ;  Carcinogenicity Category 2 ; Flammable liquids Category 2 Acute toxicity Category 3 (dermal); Acute toxicity Category 3 (inhalation - dusts and mists); Specific target organ toxicity – single exposure Category 3 (respiratory system); Specific target organ toxicity – single exposure Category 3 (central nervous system); Acute toxicity Category 4 (oral); Acute toxicity Category 4 (inhalation - vapours)

StorageNot stored at nanoFAB (kept in user's lab and brought to cleanroom for processing).
DisposalSeal all waste (including foil liners, pipettes, cleanroom wipes, etc.) in a large Ziploc bag, and dispose of in red organic sharps waste pail in secondary litho area.  Ziploc bags are provided in the cabinet at the end of the wet aisle table, opposite the resist fridges.   Liquid developer waste (IPA) and rinses may be dumped into solvent waste cup sinks or bottles.
CommentsAll spin-coating and soft-baking must occur in Aisle 1 fumehood, with the sash kept as closed as possible.  Must be spun on in foil-lined Headway spinner and fully soft-baked on a foil-lined hot plate in the fumehood.  Use a disposable glass pipette to transfer precursor to specimen when spin-coating.  May be exposed in the Nanoscribe PPGT+ (oil immersion mode or 20× air objective only:  no immersion (DiLL) mode allowed) or Heidelberg MLA150.  All developing must be done in user-owned dedicated glassware (no common glassware allowed), cleaned and stored in user's cleanroom locker or lab.


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Please contact a nanoFAB staff member for uses not listed above.

Additional information