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ProductPhosphosilicate Solution
Manufacturer

Filmtronics Inc.

Composition55–70% ethanol, 20–30% phosphorus polymer ingredient #2 (proprietary), 0.1–25% phosphorus polymer ingredient #1 (proprietary), 1–10% water; liquid
SynonymsP452, P499, P500, P501, P502, P503, P504, P505, P506, P507, P508, P509, P510, P511, P512
Typical UsesSpin-on dopant (SOD) for diffusion doping of silicon
Hazards

Nfpa704
HealthNum2
FlamNum3
 
Whmis picts
Flamtrue
Corrtrue
Excltrue

Hazcat
HazClassSerious eye damage/eye irritation
HazCat1
,
Hazcat
HazClassSkin corrosion/irritation
SubCatA
HazCat1
,
Hazcat
HazClassFlammable liquids
HazCat2
, Acute aquatic environmental hazards
Hazcat
HazClass[none]
HazCat2
,
Hazcat
HazClassSpecific target organ toxicity – single exposure
HazCat3
(respiratory irritation),  
Hazcat
HazClassAcute toxicity
HazCat4
(inhalation:  dust, mist)

StorageCabinet 14 (photoresist fridge)
DisposalSeal all waste (including foil liners, pipettes, cleanroom wipes, etc.) in a large Ziploc bag, and dispose of in red organic sharps waste pail in secondary litho area.  Ziploc bags are provided in the cabinet at the end of the wet aisle table, opposite the resist fridges.
Comments

All spin-coating and soft-baking must occur in Aisle 1 fumehood.  Must be spun on in foil-lined Headway spinner and fully soft-baked on a foil-lined hot plate in the fumehood. 

After fully soft-baked, may be processed in the RTA to diffuse dopants. 

Strip annealed SOD using BOE in wet deck 1A/1B.

N.B.  This material may not be processed in the Allwin 610 RTA.

Status




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Import Request

Abhishek Kumar, NRC NANO, . [Request]





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