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At this time the only supported file format for photomask fabrication is GDSII. Before you can submit a GDSII file for fabrication, ensure that you have been authorized to submit photomasks for fabrication under your desired project. You may also want to refer to the photomask fabrication & shipping policies. |
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The nanoFAB provides fabrication services for 5” × 5” and 7” × 7” photomasks. A photomask is a key component in your fabrication process as it is used to define the patterns you transfer during optical photolithography. At the nanoFAB, we also provide access to CAD software and training resources that you can use to design your photomask onsite. You can also design your mask using any software capable of producing a GDSII file (the filetype required for submission); however, we are unable to provide support should you run into problems with another CAD system. The physical properties of the masks produced in the nanoFAB are:
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Step-by-step guide
- Login to LMACS
- Click Photomasks from the main menu bar
- Enter the appropriate information in the Mask Details section (project, name of cell to be printed, GDSII file, mask type, lens type, etc.).
- Additional information can be found by expanding the grey info boxes at the right side of the screen (General Instructions, Project, GDSII File, …).
- If there is no Select Project drop down menu, ensure you have been authorized to submit photomasks
- Enter the information for the layer(s) to be printed in the Layer [N] details section.
- Of particular importance is the polarity (inverted/non-inverted) and orientation (RRCU/RRCD).
- You can add additional layers to be printed (each layer represents a physical mask) by pressing the Add Layer button and entering the corresponding data for that layer.
- When finished, click Submit Request. You will receive a confirmation email.
- Wait for notification that your mask is complete and ready for pick-up / shipping.
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If your GDSII file is larger than 50 MB - follow these instructions. |
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You can monitor the status of the fabrication online (Photomasks → Queue) and you will also receive email notifications as your mask moves through the process (Submitted → Compiled → Exposing → Exposed → Done). Please note that a status of “Exposed” only means that the exposure step has been completed: developing, Cr etching, and resist stripping steps still remain. The mask is not ready for pick-up/shipping until its status is “Done”. |
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