Product
ZEP-A
Manufacturer
ZEON Corporation
Composition
100%
anisole
; liquid
Synonyms
anisole, methoxybenzene, methyl phenyl ether
Typical Uses
Electron-beam lithography resist dilution
Hazards
Storage
Cabinet 5
(flammables cabinet in Wet Aisle 2)
Disposal
Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
Status
Please contact a nanoFAB staff member for uses not listed above.