Product
HEXAMETHYLDISILAZANE
Manufacturer
Integrated Micro Materials
Composition
1,1,1,3,3,3-Hexamethyldisilazane
Synonyms
HMDS
Typical Uses
Adhesion promoter in photolithography
Hazards
Storage
P1-004
Disposal
Used in vapour form under vacuum in the
YES YES3TA HMDS Oven
. Pump exhausts to general building exhaust.
Comments
No application outside the
YES YES3TA HMDS Oven
Status
Please contact a nanoFAB staff member for uses not listed above.