ProductHEXAMETHYLDISILAZANE
ManufacturerIntegrated Micro Materials
Composition1,1,1,3,3,3-Hexamethyldisilazane
SynonymsHMDS
Typical UsesAdhesion promoter in photolithography
Hazards

 

StorageP1-004
DisposalUsed in vapour form under vacuum in the YES YES3TA HMDS Oven. Pump exhausts to general building exhaust.
CommentsNo application outside the YES YES3TA HMDS Oven
Status

  




Please contact a nanoFAB staff member for uses not listed above.