ProductSU-8 Developer
ManufacturerMicroChem Corp.
Composition99.5–100% 1-methoxy-2-propanol acetate, 0–0.5% 2-methoxy-1-propanol acetate; liquid
SynonymsPGMEA
Typical UsesDeveloper for SU-8 photolithography and Nanoscribe photoresins
Hazards

StorageCabinet 6 (flammables cabinet in Wet Aisle 2); underneath litho wet decks
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
Status

  




Please contact a nanoFAB staff member for uses not listed above.