Product
SU-8 Developer
Manufacturer
MicroChem Corp.
Composition
99.5–100%
1-methoxy-2-propanol acetate
, 0–0.5%
2-methoxy-1-propanol acetate
; liquid
Synonyms
PGMEA
Typical Uses
Developer for SU-8 photolithography and Nanoscribe photoresins
Hazards
,
,
Storage
Cabinet 6
(flammables cabinet in Wet Aisle 2)
; underneath litho wet decks
Disposal
Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
Status
Please contact a nanoFAB staff member for uses not listed above.