Fourier-transform infrared spectroscopy (FTIR)[1] is a technique used to obtain an infrared spectrum of absorption or emission of a solid, liquid or gas. An FTIR spectrometer simultaneously collects high-resolution spectral data over a wide spectral range.




LMACS Name

FTIR (Nicolet 8700)

Confluence Label

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Company-Model#-Tool

Process Area

Model8700
VendorThermo Nicolet
Team





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Service Contract

   

Purchase Info
Installation




Contacts


NameCompanyEmailPhone
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System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC



Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder


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