Differential Scanning Calorimeters (DSC) measure temperatures and heat flows associated with thermal transitions in a material.




LMACS NameDifferential Scanning Calorimeter (DSC)
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Company-Model#-Tool

Process Area

ModelQ1000
VendorTA instrument
Team





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Service Contract

   

Purchase Info
Installation




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NameCompanyEmailPhone
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System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC



Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder


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