ProductDeveloper AR 600-549
ManufacturerAllresist GmbH
Composition≥90% diethyl malonate, <10% anisole; liquid
Synonyms
Typical UsesElectron-beam lithography resist developer
Hazards

StorageCabinet 6 (flammables cabinet in Wet Aisle 2)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
CommentsTo be used in litho wet decks only, for room-temperature development.  Do not heat.
Status





Import Request

Trong Ngo, Barclay group,  . [Request]





Please contact a nanoFAB staff member for uses not listed above.