Product
Microposit MF-CD-26 Developer
Manufacturer
Rohm And Haas Electronic Materials LLC
Composition
95.0–99.0%
water
, 1.0–5.0%
tetramethylammonium hydroxide
; liquid
Synonyms
CD-26
Typical Uses
Developer for photolithography
Hazards
,
(oral),
(dermal),
,
Storage
Cabinet 13
(bases cabinet in Wet Aisle 1); underneath litho wet decks
Disposal
Pour into wet deck (Litho Wet Deck 1/2, Wet Deck 1A/1B/2A) and rinse copiously with DI water.
Comments
TMAH concentration of 2.38%. Normality of 0.261 N.
Status
Please contact a nanoFAB staff member for uses not listed above.