Provide a general description of the system. This should be a high level overview, probably the first paragraph of a product brochure |
Contacts
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Wafer Handling | pieces (mounted) | 100 mm | 150 mm | |
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Gas Species | O2 | C4F8 | SF6 | Ar |
ICP Power | 3 kW | |||
RF Power | 300 W | |||
Chuck | -150 ºC (min) | 80 ºC (max) | mechanical clamp | HBC |
SOP | |
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Hazard Assessment |
Staff Documents
Drive Folder |