Provide a general description of the system. This should be a high level overview, probably the first paragraph of a product brochure




LMACS NameInsert LMACS name and link to public details page
Process Area

ModelInsert the Equipment model 
VendorInsert the Equipment vendor
Team

list the nanoFAB team members associated

ex. Michael Hume  Glenn Elaschuk  Aaron Hryciw Aditi Ganji





Serial NumberInsert the equipment serial number
UofA Asset Tag NumberInsert the equipment UofA Asset tag number
Service Contract

   



<insert tool photo using Insert > Files and images > Images from the web > use URL from LMACS tool page > 


Contacts


NameCompanyEmailPhone
Technical ContactInsert the technical contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC


Key Documents

SOP
Hazard Assessment



Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder


Related Documents