GDSII is the file format used for photomask submissions, direct-write laser lithography (DWL) exposures, and electron-beam lithography (EBL) exposures. While not a recommended approach, this how-to provides details on how to prepare a design using AutoCAD such that it can be successfully converted into GDSII with a minimum of errors. |
Converting from DXF saved from AutoCAD to GDSII often produces unintended results/defects in the design. It is highly recommended to create your GDSII pattern using a native GDSII editor such as KLayout, or a script-based approach (Raith_GDSII, python-gdsii), rather than creating the design in AutoCAD and converting to GDSII. Please see this page on GDSII design software options. |
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