ProductTrichloromethylsilane
ManufacturerSigma-Aldrich
Composition≤100% trichloromethylsilane; liquid
SynonymsTMCS, trimethylsilyl chloride, chlorotrimethylsilane
Typical UsesAnti-adhesion monolayer for PDMS processing.
Hazards

 

, , , (oral), (inhalation), (respiratory system), (dermal)

StorageFlammable storage cabinet 5 in cleanroom.  Small volume of vials stored with PDMS in the clean side of the subFAB.
DisposalOrganic liquid waste container in liquid form, PDMS waste container for used vial.
Comments
Status

  






Please contact a nanoFAB staff member for uses not listed above.