The UV Flood Exposure system provides uniform UV exposure over a wide area. It is primarily used for resist stripping and curing.




LMACS NameUV Flood Exposure System (Sunny)
Confluence Labelabm-uv-flood-exposure-system-sunny
Process Area

ModelN/A
VendorABM USA
Team

Breanna Cherkawski Scott Munro Adam Pettigrew





Serial Number1-27-99
UofA Asset Tag NumberN/A
Service Contract




Contacts


NameCompanyEmailPhone
Technical ContactDan MaurerABM USAdan@abmusainc.com(408)-972-5085
Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces100 mm150 mmUp to 7"x7"
ExposureManualAutomated


Key Documents

SOPABM UV Flood Exposure System - Sunny - SOP
Hazard AssessmentABM UV Flood Exposure System - Sunny - HA



Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder


Related Documents