SemiTool 870-S double stack SRD. Top unit suitable for up to 150 mm substrates, bottom rotor suitable for 100m, round substrates. |
Contacts
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Top Rotor | 150 mm (A190-60M-0215) |
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Botom Rotor | 100 mm (A190-40M-0215) |
Nitrogen | N2 purge saver |
Control | Sitek SlickDevice SI touch screen controller |
Recipes | Up to 20 programmable recipes |
Capacity | 25 wafers |
Staff Documents
Drive Folder |
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