SemiTool 870-S double stack SRD. Top unit suitable for up to 150 mm substrates, bottom rotor suitable for 100m, round substrates.


Sitek 870-S SRD (top - 150 mm round)  Sitek 870-S SRD (bottom - 100 mm round)

Confluence Labelsitek-semitool-870-s-srd
Process Area

ModelSemiTool 870-S
VendorSitek Process

Serial NumberSRD-01091
UofA Asset Tag Number717988
Service Contract

Top - 150mm Round

Bottom - 100mm Round


Technical ContactDaniel MullanySitek Processdmullany@sitekprocess.com1 916-797-9000 x2201
Sales ContactJim MullanySitek Processjmullany@sitekprocess.com1 916-975-2200

System Features

Top Rotor150 mm (A190-60M-0215)
Botom Rotor100 mm (A190-40M-0215)
NitrogenN2 purge saver
ControlSitek SlickDevice SI touch screen controller
RecipesUp to 20 programmable recipes
Capacity25 wafers

Key Documents

SOP & Hazard AssessmentSitek SemiTool 870-S SOP & HA Listing

Staff Documents

Operator Manual

Equipment Manual

Source Inspection

Drive Folder

Related Documents

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