The Variable Angle Spectroscopic Ellipsometer is capable of high accuracy measurement of various optical properties of thin film materials.  It is primarily used to measure the film thickness and/or optical constants from a thin film.  Analysis is simplest for single-layer films deposited on a Si substrate, although analysis of multilayer specimens is also reasonably straightforward.

Contacts

Staff Documents

Insert reference to nf-Equipment/<Equipment Name> folder for access to all docs. Call out the manuals and schematics 

Drive Folder