A four-pocket manual electron-beam evaporation system for deposition of dielectric and metal thin films.

One of the pockets, labelled "Au", has been designated for gold deposition only.  Please have staff refill aluminum and gold pellets.




LMACS NameElectron-Beam Evaporation System #1 (Gomez)

electron-beam-evaporation-system-1-gomez
Process Area

VendorKurt J Lesker
Team

Timothy Harrison  Aaron Hryciw Glenn Elaschuk





Serial Number
UofA Asset Tag Number442441
Service Contract

   





Contacts


NameCompanyEmailPhone
Technical ContactJean HawkerKJLCjeanh@lesker.com1-412-387-9068
Sales ContactJoey KellerKJLCjoeyk@lesker.com1-416-209-2281



System Features


Four-pocket e-beam hearth

Materials: metals, oxides

Gas species:  Ar, O2

No substrate rotation


Documents

Operating Procedure

Gomez E-Beam Evaporation System SOP

Hazard AssessmentElectron-Beam Evaporation System #1 (Gomez) HA
QCM Material Parameters

QCM Material Parameters


Staff Documents

Service ManualMaintenance procedures
PM ProcedurePM Procedure
Precious metals usage form

Au consumption records

Drive Folder


Related Documents

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