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The PDS 2010 is a vacuum system used for the vapour deposition of the parylene polymer onto a variety of substrates. The clear polymer coating provides an extremely effective chemical and moisture barrier with high dielectric and mechanical strength.

LMACS Name	Parylene Deposition System
Confluence Label	pds-2010-parylene-deposition-system
Process Area
Model	PDS-2010
Vendor	Specialty Coating Systems
Team	Timothy Harrison Glenn Elaschuk Aaron Hryciw

Serial Number	140210
UofA Asset Tag Number	528475
Service Contract

Contacts

	Name	Company	Email	Phone
Sales Contact	Joanna Sellers	SCS	jsellars@scscoatings.com	(317) 244-1200 x0280
Consumables			scscustomerservice@scscoatings.com

System Features

Parylene C and parylene N are provided
Maximum substrate size: 20 cm diameter, 26 cm height
Two removable jigs are available with 20 cm diameter shelves, although support posts reduce clear area to ~15 cm diameter:
1) Two shelves with 10 cm and 8.5 cm headroom
2) Three shelves with 9 cm, 9 cm, and 4.5 cm headroom

Parylene type	Characteristics	Deposition parameters
Parylene C	Typically used for thicker coatings (several µm) Useful combination of electrical and physicals properties for most applications Very low permeability to moisture and corrosive gases Insoluble in any solvent at room temperature Average crevice-penetrating ability	~5 µm/hr (0.0002"/hr) 500 nm/g 125 g max per run
Parylene N	Typically used for thinner coatings (nm to a few µm) High dielectric strength Low, frequency invariant dielectric constant Very low dissipation factor Very high crevice-penetrating ability	760 nm/hr (0.00003"/hr) 100 nm/g 125 g max per run

Documents

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Operating Procedure	Parylene Deposition System SOP
Hazard Assessment	Parylene Depostion System HA
Datasheet

Staff Documents

Operator Manual

Contacts

System Features

Documents

Staff Documents

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