An atmospheric-pressure quartz tube furnace for general annealing and glass bonding. No metals are allowed in this furnace; metal-containing wafers can be annealed in the Muffle Furnace or Tystar Doped Anneal tool.




LMACS NameTystar General Anneal (tube 6)
Process Area

ModelTystar Mini Series
VendorTystar
Team





Serial Number4201062LS
UofA Asset Tag Number454969
Service Contract

   





Contacts


NameCompanyEmailPhone
Technical ContactHenry HeidbrederTystarhenryh@tystar.com310-781-9219 ext 213

Jim SmithTystarjsmith@tystar.com310-781-9219 ext 219
Sales ContactLong HoangTystarlong@tystar.com310-781-9219 ext 223



Process Gases

Process GasesMax Flow (MFC Range)
N2

10000 sccm

Temperature Range

ZoneMinMax
1500 C1100 C
2500 C1100 C
3500 C1100 C

System Features

Temperature



Duration




Documents

Insert links to Google Drive documents OR links to confluence pages that contain the docs

Operating Procedure
Hazard Assessment


Staff Documents

Insert reference to nf-Equipment/<Equipment Name> folder for access to all docs. Call out the manuals and schematics 


Tystar DocumentationTystar Furnaces
Service ManualTystar Furnaces/Maintenance
Temperature Calibration

nanoFAB Quartz Inventory

Drive Folder


Related Documents

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