Contact lithography mask aligners




LMACS Name

Mask Aligner (IR through-wafer) (Bert)

Confluence Labelabm-mask-aligner-bert
Process Area

ModelABM Manual Mask Aligner System With Split-Field Microscope Frontside And BSV/BSIR Backside Alignment
VendorABM USA
Team

Breanna Cherkawski Scott Munro Adam Pettigrew 




Serial Number60910
UofA Asset Tag NumberN/A
Service Contract

 




Contacts


NameCompanyEmailPhone
Technical ContactDan MaurerABM USAdan@abmusainc.com(408)-972-5085
Sales ContactInsert the sales contact




System Features

1IR through-wafer imaging for backside alignment (4" diameter wafers with 5" x 5" photomasks only)
2Tooling: 3", 4", and 6" diameter wafers, 4" x 4" square substrates, and small pieces
3Mask tooling: 5" x  5" or 7" x 7" square photomasks
4UV illumination (365 nm & 405 nm)


Key Documents

Insert links to Google Drive documents OR links to confluence pages that contain the docs

Operating Procedure

ABM Mask Aligner - Bert - SOP 

Hazard AssessmentN/A


Staff Documents

IR Alignment Procedure

Uniformity ChecksABM Mask Aligner - Intensity & Uniformity Procedure
Mask Aligner Manual

Intensity Meter Manual

Expose System Manual

Lamp Power Supply Manual

Drive Folder


Related Documents

Update tags to display related documents below