Product

Ruthenium

ManufacturerKurt J Lesker Company
Composition100% ruthenium; solid
SynonymsRu
Typical UsesThin-film deposition for microelectronics, catalysis, surface coatings
Hazards

Not regarded as hazardous under normal use.

StorageNot stored at the nanoFAB.
DisposalSharps waste in 10k area or cleanroom (broken specimens)
CommentsNot a stocked material:  users must provide their own sputtering targets.
Status

Deposition allowed in all sputtering systems.




Please contact a nanoFAB staff member for uses not listed above.