ProductBoron Trichloride - 3%
ManufacturerPraxair
Composition

3% BCL3 : 97% N2

SynonymsInert Gas(es) (Ar, He and/or N) - Boron Trichloride 0.1 ppm - 2.99999%
Typical UsesLPCVD
Hazards

 *note this is for 100% BCL3

StorageTo be stored in accordance with NFPA 55
DisposalOnly available for use in contained systems with appropriate abatement
CommentsThis is a gas mixture delivered under sub-atmospheric conditions
Status

  




Please contact a nanoFAB staff member for uses not listed above.