| Product | ZEP-A |
|---|---|
| Manufacturer | ZEON Corporation |
| Composition | 100% anisole; liquid |
| Synonyms | anisole, methoxybenzene, methyl phenyl ether |
| Typical Uses | Electron-beam lithography resist dilution |
| Hazards |
Flammable liquids Category 3
|
| Storage | Cabinet 5 (flammables cabinet in Wet Aisle 2) |
| Disposal | Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | |
| Status | STOCKED |
Check First
Please contact a nanoFAB staff member for uses not listed above.