System Features
Top Rotor | 150 mm (A190-60M-0215) |
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Botom Rotor | 100 mm (A190-40M-0215) |
Nitrogen | N2 purge saver |
Control | Sitek SlickDevice SI touch screen controller |
Recipes | Up to 20 programmable recipes |
Capacity | 25 wafers |
Key Documents
SOP & Hazard Assessment | Sitek SemiTool 870-S SOP & HA Listing |
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