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Overview

A batch barrel etcher for the removal of photoresist, descum, and surface activation

LMACS Name

Branson 3000 Barrel Etcher

Confluence Label

BRANSON-BARREL-ETCHER

Process Area

Plasma Etch

Model3000
Vendor

Allwin 21 (Branson IPC)

Team

Scott Munro Adam Pettigrew Glenn Elaschuk 



System Features


Documents

Operating Procedure

Hazard Assessment

Related Documents

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