Brewer 200X Spin Coater

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Overview

Spin Coater set-up for most EBL resist spinning applications.

LMACS Name	Brewer Spinner and Hotplate
Confluence Label	brewer-200x-spin-coater
Process Area	Lithography
Model	200X
Vendor	Brewer Science
Team	Stephanie Bozic Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Michael Hume Adam Pettigrew

System Features

Chucks for specimen sizes ranging from 3 mm to 100 mm
Maximum spin speed of 12 000 RPM
Removable bowl lining for easy cleaning

Key Documents

SOP	Brewer Spinner and Hotplate SOP
Hazard Assessment	Brewer Spinner and Hotplate HA

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