| Product | Organic Polymer Solution / 950 PMMA Series Resists in Anisole |
|---|---|
| Manufacturer | MicroChem Corporation |
| Composition | 1–15% poly(methylmethacrylate), 85–99% anisole; liquid |
| Synonyms | PMMA, PMMA 950 |
| Typical Uses | Electron-beam lithography resist |
| Hazards | 
Serious eye damage/eye irritation Category 2B
,
Flammable liquids Category 3
,
Skin corrosion/irritation Category 3
, Acute toxicity (inhalation – gas/vapour) Category 3,
Specific target organ toxicity – single exposure Category 3
, Aquatic hazards / aquatic environmental toxicity Category 3 |
| Storage | Cabinet 6 (flammables cabinet in Wet Aisle 2); Cabinet 11 (flammables cabinet in Wet Aisle 1) |
| Disposal | Solid: Organic waste / organic sharps waste containers in primary or secondary litho areas. Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A. |
| Comments | |
| Status | STOCKED |
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Please contact a nanoFAB staff member for uses not listed above.