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Overview

LMACS Name

Atomic Force Microscope (Dimension Edge)

Confluence Label

bruker-dimension-edge-afm

Process Area

Characterization

Model
VendorBruker
Team



System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC

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