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Differential Scanning Calorimeters (DSC) measure temperatures and heat flows associated with thermal transitions in a material.

LMACS NameDifferential Scanning Calorimeter (DSC)
Confluence Label

Process Area


VendorTA instrument

System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW

RF Power300 W

Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC

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