Four-Point Probe

Overview

Lucus Pro4 4000 sheet and bulk resistivity measurement system with Keithley 2601A sourcemeter, range: 1 mΩ to 100 MΩ per cm square. Identify Si wafer N/P type.

LMACS Name	Four-Point Probe (Pro4 4000)
Confluence Label	lucasLabs-pro4-6M00
Process Area	Characterization
Model	Pro4-6M00
Vendor	Lucas Labs
Team	Nastaran Yousefi Devin Fortier Peng Li
Location	CME-L2-128

System Features

Resistivity Range	1 mΩ to 100 MΩ per cm square
Current Range	is 5E-08 to 1000 mA.
Minimum sample size	4 *4 mm

Key Documents

SOP	Four-Point Probe (Pro4 4000) SOP
Hazard Assessment	Four-Point Probe (Pro4 4000) HA

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Four-Point Probe (Pro4 4000)

System Features

Key Documents

Related Documents