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Overview

LMACS NameEllipsometer (M-2000V)
Process Area

Characterization

Model
VendorJ.A. Woollam
Team

Peng Li Shiau-Yin Wu 



System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC

Key Documents

SOP
Hazard Assessment

Related Documents

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