You are viewing an old version of this page. View the current version.

Compare with Current View Page History

Version 1 Next »

Overview

LMACS Name
Process Area

Characterization

Model
Vendor
Team



System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC

Key Documents

SOP
Hazard Assessment

  • No labels