Overview

Achilles is an AXXIS deposition system: an electron-beam evaporator with computer-controlled substrate tilt (α) and rotation (φ), which enables the deposition of nanostructured thin films via the glancing angle deposition (GLAD) technique.

LMACS NameGLAD System (Achilles)
Confluence Labelglad-system-achilles
Process Area

Deposition

ModelAXXIS
VendorKurt J Lesker Company
Team

Timothy Harrison Glenn Elaschuk Aaron Hryciw 



System Features


Four-pocket e-beam evaporation hearth


Materials: metals, Si, C, oxides

Dual-axis substrate motion: tilt (α) and azimuthal rotation (φ)

Adjustable deposition pressure (variable position gate valve & MFCs)

Base pressure: ~4e-8 Torr (20 hr pumpdown)

Key Documents

SOP
Hazard AssessmentGLAD System (Achilles) - Hazard Assessment
QCM Material ParametersQCM Material Parameters

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