System Features
Four-pocket e-beam evaporation hearth | |
Materials: metals, Si, C, oxides | |
Dual-axis substrate motion: tilt (α) and azimuthal rotation (φ) | |
Adjustable deposition pressure (variable position gate valve & MFCs) | |
Base pressure: ~4e-8 Torr (20 hr pumpdown) |
Key Documents
SOP | |
---|---|
Hazard Assessment | GLAD System (Achilles) - Hazard Assessment |
QCM Material Parameters | QCM Material Parameters |
Related Documents