Please note due to Covid-19 restrictions, access to some nanoFAB resources may not be available.
Skip to end of metadata
Go to start of metadata

You are viewing an old version of this page. View the current version.

Compare with Current View Page History

Version 1 Current »

ProductNovec Engineered Fluid 7200DL

3M Canada Company

Composition55–90% ethyl nonafluoroisobutyl ether, 10–45% ethyl nonafluorobutyl ether; liquid
Typical UsesAlternative solvent for CTXSP2 polymer, used for stripping and lift-off.

3 0 1  


Physical hazards not otherwise classified Category 1 (In use, may form flammable/explosive vapour-air mixture.)

StorageCabinet 5 (organic solvents)
DisposalLiquid:  Collect waste in dedicated "Halogenated waste" bottle, to be stored in Cabinet 5 until full.  Solid:  Organic waste / organic sharps waste containers in primary or secondary litho areas.

Use in litho wetdecks or Aisle 1 General Use wetdecks for lift-off/stripping processing.

(warning) Avoid extreme heat:  combustion / thermal decomposition products include hydrogen fluoride (HF), and perfluoroisobutylene.


Check First

Please contact a nanoFAB staff member for uses not listed above.

  • No labels