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Overview

SemiTool 870-S double stack SRD. Top unit suitable for up to 150 mm substrates, bottom rotor suitable for 100m, round substrates.

LMACS Name

Sitek SRD (top - 150 mm), Sitek SRD (bottom - 100 mm)

Process Area

Wet Processing

ModelSemiTool 870-S
VendorSitek Process
Team

Michael Hume Adam Pettigrew

Aaron Hryciw Stephanie Bozic 




Top - 150mm 

Bottom - 100mm


System Features

Top Rotor150 mm (A190-60M-0215)
Botom Rotor100 mm (A190-40M-0215)
NitrogenN2 purge saver
ControlSitek SlickDevice SI touch screen controller
RecipesUp to 20 programmable recipes
Capacity25 wafers

Key Documents

SOPSitek - Semitool 870-S SRD - SOP
Hazard Assessment

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