System Features
Top Rotor | 150 mm (A190-60M-0215) |
---|---|
Botom Rotor | 100 mm (A190-40M-0215) |
Nitrogen | N2 purge saver |
Control | Sitek SlickDevice SI touch screen controller |
Recipes | Up to 20 programmable recipes |
Capacity | 25 wafers |
Key Documents
SOP | Sitek - Semitool 870-S SRD - SOP |
---|---|
Hazard Assessment |
Related Documents
Content by label
There is no content with the specified labels