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nanoFAB Equipment
Equipment List
Oxford NGP80 RIE
Jira links
Processing on the Oxford NGP80
Equipment
Oxford PlasmaPro NGP80 RIE
Synonyms
RIE
Process Area
Plasma Etch
application-note
rie
sop
oxford-ngp80-rie
plasma
etch
plasma-etch
Overview
Content Tools
{"serverDuration": 69, "requestCorrelationId": "904fd14662d696c7"}