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ProductTrichloromethylsilane
ManufacturerSigma-Aldrich
Composition≤100% trichloromethylsilane; liquid
SynonymsTMCS, trimethylsilyl chloride, chlorotrimethylsilane
Typical UsesAnti-adhesion monolayer for PDMS processing.
Hazards

W 3 2 3   Flammable Corrosive Toxic Less serious health effects

Serious eye damage/eye irritation Category 1 , Skin corrosion/irritation Category 1A , Flammable liquids Category 2 , Acute toxicity Category 3 (oral), Acute toxicity Category 3 (inhalation), Specific target organ toxicity – single exposure Category 3 (respiratory system), Acute toxicity Category 4 (dermal)

StorageFlammable storage cabinet 5 in cleanroom.  Small volume of vials stored with PDMS in the clean side of the subFAB.
DisposalOrganic liquid waste container in liquid form, PDMS waste container for used vial.
Comments
Status

STOCKED RESTRICTED USE 


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Please contact a nanoFAB staff member for uses not listed above.