| Product | Trichloromethylsilane |
|---|---|
| Manufacturer | Sigma-Aldrich |
| Composition | ≤100% trichloromethylsilane; liquid |
| Synonyms | TMCS, trimethylsilyl chloride, chlorotrimethylsilane |
| Typical Uses | Anti-adhesion monolayer for PDMS processing. |
| Hazards |
Serious eye damage/eye irritation Category 1
,
Skin corrosion/irritation Category 1A
,
Flammable liquids Category 2
,
Acute toxicity Category 3
(oral),
Acute toxicity Category 3
(inhalation),
Specific target organ toxicity – single exposure Category 3
(respiratory system),
Acute toxicity Category 4
(dermal) |
| Storage | Flammable storage cabinet 5 in cleanroom. Small volume of vials stored with PDMS in the clean side of the subFAB. |
| Disposal | Organic liquid waste container in liquid form, PDMS waste container for used vial. |
| Comments | |
| Status | STOCKED RESTRICTED USE |
Check First
Please contact a nanoFAB staff member for uses not listed above.