Wet Deck 2A

Overview

Wet Deck 2A is used for general H₂O and organic wet processing including soaking and ultrasonic bath. The is also a KOH bath available for users . With additional training, use of TMAH is permitted. Due to the additional hazard of using this chemical, a Buddy is required for after-hours access.

LMACS Name	Wet Process - General Use - Wet Deck 2A, Wet Process - ISE KOH Bath - Wet Deck 2A
Confluence Label	wet-deck-2a
Process Area	Wet Processing
Model	N/A
Vendor	N/A
Team	Breanna Cherkawski Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Adam Pettigrew

System Features

Wafer Handling	Pieces	100 mm	150 mm
Gas Species	N₂
Water Supply	City	DI
Acceptable Chemicals	Acetone/IPA	KOH	TMAH

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