Wet Deck 1A

Overview

Wet Deck 1A can be used for BOE/HF, metal etching, and organic solvent processes.

LMACS Name	Wet Deck 1A - HF/BOE, Wet Deck 1A - General Use, Wet Deck 1A - Metal Etch
Confluence Label	wet-deck-1a
Process Area	Wet Processing
Model	N/A
Vendor	N/A
Team	Breanna Cherkawski Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Adam Pettigrew

System Features