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ProductCYTOP CTX-8**SP2 (** = 01 ~ 15)

AGC Inc.

Composition85–99% Perfluorotributylamine, 5% Diazonaphthoquinonesulfonic ester, 19% Cresol novolak resin; liquid
SynonymsPerfluorinated solvent
Typical UsesLift-off layer for organic depositions; replacement for Orthogonal SL2.

1 1 1  

Not classified as hazardous.

StorageCabinet 11 (photoresists) or Cabinet 14 (flammables fridge)
DisposalLiquid:  Collect waste in dedicated "Halogenated waste" bottle, to be stored in Wet Aisle 2 solvent cabinet until full.  Solid:  Organic waste / organic sharps waste containers in primary or secondary litho areas.
CommentsTo be spin-coated using Laurell spinner and baked in Aisle 1 Fumehood.  Do not heat ≥300 °C:  product may decompose and evolve carbonyl fluoride, hydrogen fluyoride (HF), and perfluoro isobutylene.

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Please contact a nanoFAB staff member for uses not listed above.

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