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Overview

A planar magnetron sputtering system with three guns, for deposition of metals. The gun/substrate configuration is designed for sequential sputtering.



System Features

Sputter Gun Type2 three inch1 three inch for magnetic materials
Gas SpeciesAr
Power SupplyMDX 500
Featuressubstrate rotation

Documents

Operating Procedure
Hazard AssessmentSputtering System #1 (Bob) HA