You are viewing an old version of this page. View the current version.

Compare with Current View Page History

« Previous Version 11 Next »

ProductMicroposit MF-319 Developer
ManufacturerRohm And Haas Electronic Materials LLC
Composition95.0–99.0% water, 1.0–5.0% tetramethylammonium hydroxide, <1.0% polyalkylene glycol; liquid
Synonyms319, MF-319
Typical UsesDeveloper for photolithography
Hazards

3 0 0

Corrosive Serious health effects

Corrosive to metals Category 1
Specific target organ toxicity – single exposure Category 1
 (oral), 
Specific target organ toxicity – repeated exposure Category 1
(dermal), 
Skin corrosion/irritation Category 2
Serious eye damage/eye irritation Category 2A

StorageDeveloper cabinet in wet aisle 1; underneath litho wet decks
DisposalPour into wet deck (Litho Wet Deck 1/2, Wet Deck 1A/1B/2A) and rinse copiously with DI water.
CommentsStandard developer for LOR 5B in lift-off bilayer process.  Contains 2.45% TMAH; normality of 0.237 N.
Status

STOCKED  

Check First

Please contact a nanoFAB staff member for uses not listed above.

  • No labels