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ProductDichlorosilane
ManufacturerPraxair
Composition

SiH2Cl2

SynonymsChlorosilane A-199, DCS
Typical UsesLPCVD, Nitride Growth
Hazards

OX 4 2 4  

Flammable Pressurized Corrosive Toxic

StorageNot to be stored onsite.
DisposalOnly available for use in contained systems with appropriate abatement
CommentsThis is a gas mixture delivered under sub-atmospheric conditions
Status

 RESTRICTED USE 

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Please contact a nanoFAB staff member for uses not listed above.