| Product | Dichlorosilane |
|---|---|
| Manufacturer | Praxair |
| Composition | |
| Synonyms | Chlorosilane A-199, DCS |
| Typical Uses | LPCVD, Nitride Growth |
| Hazards |
|
| Storage | Not to be stored onsite. |
| Disposal | Only available for use in contained systems with appropriate abatement |
| Comments | This gas is delivered under sub-atmospheric conditions |
| Status | RESTRICTED USE |
Check First
Please contact a nanoFAB staff member for uses not listed above.