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ProductBoron Trichloride - 3%
ManufacturerPraxair
Composition

3% BCL3 : 97% N2

SynonymsInert Gas(es) (Ar, He and/or N) - Boron Trichloride 0.1 ppm - 2.99999%
Typical UsesLPCVD
Hazards

3 1 0  *note this is for 100% BCL3

Pressurized Less serious health effects

StorageTo be stored in accordance with NFPA 55
DisposalOnly available for use in contained systems with appropriate abatement
CommentsThis is a gas mixture delivered under sub-atmospheric conditions
Status

STOCKED RESTRICTED USE 

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Please contact a nanoFAB staff member for uses not listed above.