Please note due to Covid-19 restrictions, access to some nanoFAB resources may not be available.
Skip to end of metadata
Go to start of metadata
Applicable EquipmentHMDS Oven, Spinner, hotplate
Synonyms
Process AreaLithography

This process is deprecated, as the nanoFAB no longer stocks HPR 504.  Instead, use the LOR 5B / AZ 1512 Bilayer Procedure.