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AZ 1512 & 1529 photoresist baseline recipes
Created by
Michael Hume
, last modified by
Aaron Hryciw
on
Oct 06, 2020
Applicable Equipment
Spinner, hotplate, mask aligner, maskless aligner
Synonyms
Process Area
Photolithography
Product Spec Sheet
AZ 1500 series datasheet
recipe
tip
application-note
process
lithography
Overview
Content Tools
{"serverDuration": 74, "requestCorrelationId": "4f7d85b3a904f578"}