System Features
| • | Substrate size: ~5 mm × 5 mm to 200 mm diameter |
|---|---|
| • | Thickness measurement range: 5 nm – 40 µm |
| • | Min. thickness to measure n and k: 50 nm |
| • | Wavelength range: 190–1100 nm |
| • | Spot size: 1.5 mm |
| • | Light source: deuterium + tungsten-halogen (dual light source: may choose one or both lamps) |
| • | Measurement results visualisation in 2D and 3D |
Documents
| Operating Procedure | |
|---|---|
| Hazard Assessment |