System Features
| 6-pocket e-beam hearth: Al, Ti, Cr, Au, Ag, and Ni. Pocket 5 material (Ag), may be changed out at user request |
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| Alternative approved materials (available with >24 hr notice): Ag, Cu |
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| Cryo pumped with a base pressure of <1e-7 Torr; <4e-7 Torr achievable within 30 min pumpdown |
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| Automatic deposition recipes |
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| 300 mm Ø platen with room for substrates up to 150 mm diameter |
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| Rotating substrate holder |
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| Typical uniformity of <5% over a 150 mm wafer, <2% over a 100 mm wafer |
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ZEP-A
(nanoFAB Knowledge Base)
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